Dimensional Metrology

Dimensional Metrology Products

Measure the Invisible to Deliver Deep Process Insight Nova’s advanced multi-disciplinary dimensional metrology technologies combine complex opto-mechanical hard-ware with advanced optics and leading-edge algorithms, which deliver continuous innovation for effective process control throughout the semiconductor fabrication lifecycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance products’ yields and accelerate time to market

Dimensional Metrology

01

Materials Metrology

Materials Metrology Products

Inline Platforms for Composition and Film Thickness Measurements Nova is a market leader for innovative thin film metrology and process control innovations. Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.

Materials Metrology

02

Chemical Metrology

Chemical Metrology Products

Nova offers a market-leading portfolio of advanced, open and flexible chemical metrology platforms for backend wafer-level packaging and front-end damascene process steps. Our portfolio helps manufacturers ensure high-quality electroplating processes by carrying out chemical analysis and replenishment in real time.

Chemical Metrology

03

Software Solutions

Software Solutions

Pioneering Holistic Approach to Modeling Driven Insights Nova’s cutting-edge metrology software modeling technology provides the most comprehensive algorithmic solutions for application development including model-based, machine learning and advanced Hybrid Metrology algorithms that enable high-performance metrology and deliver breakthrough performance in Time-To-Solution (TTS) and accuracy for the most complex 3D structures

Software Solutions

04
Dimensional Metrology
Materials Metrology
Chemical Metrology
Software Solutions
Dimensional Metrology
Measure the Invisible to Deliver Deep Process Insight Nova’s advanced multi-disciplinary dimensional metrology technologies combine complex opto-mechanical hard-ware with advanced optics and leading-edge algorithms, which deliver continuous innovation for effective process control throughout the semiconductor fabrication lifecycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance products’ yields and accelerate time to market
Technologies
Materials Metrology
Inline Platforms for Composition and Film Thickness Measurements Nova is a market leader for innovative thin film metrology and process control innovations. Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
Technologies
Chemical Metrology
Nova offers a market-leading portfolio of advanced, open and flexible chemical metrology platforms for backend wafer-level packaging and front-end damascene process steps. Our portfolio helps manufacturers ensure high-quality electroplating processes by carrying out chemical analysis and replenishment in real time.
Technologies
Software Solutions
Pioneering Holistic Approach to Modeling Driven Insights Nova’s cutting-edge metrology software modeling technology provides the most comprehensive algorithmic solutions for application development including model-based, machine learning and advanced Hybrid Metrology algorithms that enable high-performance metrology and deliver breakthrough performance in Time-To-Solution (TTS) and accuracy for the most complex 3D structures
Technologies