Technology Overview
Dimensional Metrology
Dimensional Metrology

Dimensional Metrology

Emerging Metrology Solution Pioneers
Emerging Metrology Solution Pioneers

Nova’s advanced multidisciplinary dimensional metrology technologies combine complex opto-mechanical hardware with advanced optics and cutting-edge algorithms to continuously innovate for effective process control throughout the semiconductor fabrication life cycle. Nova’s technical innovation and market leadership enable customers to improve process performance, enhance product yield, and accelerate time to market.

Technologies
Hybrid Metrology
Spectral Interferometry
Optical Scatterometry
Advanced Imaging

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