Nova RACS

Rack-mounted server that efficiently manages the tool fleet within a fab, since one server can connect to many tools

Seamlessly integrates with factory automation so data can be transferred easily between the host and the system

Tool-to-tool matching minimizes overall measurement error. When all tools are matched, factories can send any wafer to any system and derive the same result to increase tool utilization and manufacturing line flexibility

Feed-forward analysis incorporates measurement data from previous runs to determine values from the current run. This is especially valuable when some layers are duplicated through the stack, as with many multilayer film structures. Wafers can be run on any tool independent of where the first measurement was made to provide maximum production flexibility