Products Overview

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Materials Metrology

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Nova QED

Nova QED

Advanced data analysis, recipe creation and maintenance system

Nova QED

Nova QED is an offline recipe creation and data analysis platform loaded onto a Nova provided laptop. Equipped with a user-friendly interface to analyze spectra and optimize production recipes, Nova QED supports Nova VeraFlex^® III, III+ and IV models.

Highlights and Benefits

Offline Functionality

Rapid Recipe Creation

High Availability

Offline Functionality

Rapid Recipe Creation

High Availability

Offline Functionality

Offline functionality enables engineers to develop recipes or conduct film analysis as well as reprocess large amounts of data in a remote office environment to enhance user satisfaction and productivity

Rapid Recipe Creation

Fast iteration of control recipes shortens time to solution and improves productivity

High Availability

With offline recipe development and film analysis, the system is more productive as it actively processes wafers