Nova MMSR+ is a high-end standalone dimensional metrology platform targeted for critical dimensions (CD) and thin film measurements for complex Optical CD applications. The combination of robust hardware, advanced modeling and machine learning algorithms offers faster throughput, high precision, and accuracy, critical for yield and cost of ownership optimization in a high-volume production environment.
Why Nova MMSR+?
Nova MMSR+ delivers extremely low variability and market-leading tool-to-tool matching to monitor and track critical parameters throughout the various steps of the most advanced IC device fabrication processes.
Incorporating Nova’s advanced suite of modeling solutions, Nova MMSR+ provides high-end performance for critical dimensions and thin film measurements of the most complex layered stacks and structures. Supported by Nova’s central fleet management, control, and connectivity solutions, Nova MMSR+ enhances operational efficiency and advanced metrology control functionality.
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