Materials Metrology
Nova is a market leader in materials metrology, with innovative, ground breaking solutions that address the most complex applications. Nova develops high productivity, highly sensitive inline materials metrology solutions enabling critical metrology to better meet the process and integration needs of semiconductor fabs.
The company’s materials metrology products are based on technologies that enable customers to accurately detect and quantify small variations in film composition and thickness along with a range of material properties, such as stress, strain, and surface properties. Providing information that no other metrology system in the fab can deliver, Nova’s solutions lead to enhanced device functionality and manufacturing yield as well as shorter time to results.
The company’s materials metrology product portfolio also includes powerful data management solutions, advanced algorithms for data analysis, and server utilities for complete fleet management.
Nova VeraFlex® is the industry standard for combined XPS and XRF composition and thickness materials characterization. Generational increases in X-ray flux lead to the highest precision and throughput available for in-line XPS. With hundreds of installed systems over 5 model generations, Nova VeraFlex® is ideal for fully automated process control to maximize yield while maintaining precise performance.
Nova Metrion® is a fully-automated, HVM-proven SIMS solution validated for inline production process control. Enabling full-wafer mapping, Nova Metrion® shortens time to feedback and delivers rapid return on investment (ROI).
Nova Elipson® is a revolutionary materials metrology solution, based on Raman Spectroscopy that is designed to measure material properties such as stress, strain and surface properties for both memory and logic applications. Nova Elipson® delivers new materials information and characteristics unmatched by any other inline materials metrology system.
