Dr. Shay Wolfling, Nova's CTO is proud to introduce the Nova Metrion®- our new in-line SIMS product and technology.

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Hello to you all, In this short online Webinar, I want to introduce the Nova Metrion®– our new in-line SIMS product and technology.

The webinar will include a short overview of the technology, a few typical use cases, and some of the product highlights.

I’m Shay Wolfling, Nova’s CTO, responsible for our technology development for the past 10 years.

Nova Metrion

Following the press release we issued, we are happy to announce Nova’s new Material Metrology solution – the Nova Metrion®.

The Nova Metrion® platform is based on the technology of Secondary Ion Mass Spectrometer (or SIMS), which is widely used today in semiconductor laboratories.

SIMS is used to measure complex logic and memory stacks and obtain precise depth-profiles of material properties.

The uniqueness and innovation of the Nova Metrion® is by bringing this advanced technology into the fab. This enables in-line SPC, in a fully automated way on 300mm production wafers.

Materials Engineering

The Nova Metrion® expands Nova’s solutions to the growing challenges of Material Engineering.

Beyond scaling and 3D architectures, customers are introducing new materials in each new generation, and the industry increases its reliance on materials engineering to advance performance and scaling.

These changes create a greater need to monitor and control advanced materials, and increase the demand for new measurements to precisely characterize minute changes in material properties.

Materials Metrology Portfolio

The usage of new methods for materials engineering is reflected in the growth of both our Xray and Optical material-metrology solutions.

Our XPS Nova VeraFlex tool for controlling composition and thickness of ultra-thin films has already been adopted in-line by all leading device makers.

The recently introduced Raman-Spectroscopy based Elipson, has also been adopted by leading memory and logic customers, running accurate in-line measurements on production wafers.

The Nova Metrion® is the newest addition to Nova’s Materials Metrology Portfolio:

  • Expanding our application coverage to include material-composition depth-profiling
  • and expanding our technology offering, to include Ions as well as X-Ray and Optics.

SIMS Technology

So, what is the SIMS Technology and how does it enable obtaining precise depth profiles of material composition?

  • We use a focused ion beam to remove minute layers of the wafer.
  • Charged ions of the extracted material (named secondary Ions) are collected and analyzed by a Mass Spectrometer, having multiple detectors that can detect different materials in parallel.
  • We thus get a full concentration and depth distribution of specific elements through the wafer- stack at the point of measurement.

Let me give one specific example:

  • This output graph shows the composition of a SiGe:B EPI wafer. Boron, Germanium, and Silicon are detected in the EPI layer.
  • The different colors show the change in concentration of the different materials as a function of depth.
  • This measurement can be repeated at several locations on the wafer, to create a wafer map.
  • The change in concentration as a function of depth is then uploaded to the factory host, where the data is monitored for process control.

As the measurement area is very small and as the source is contamination free, the wafer can go back into production to continue its manufacturing process, making Metrion a true in-line metrology tool.

Application Space

In-Line SIMS has a variety of high-value applications to significantly improve process control of critical steps.

Here we have 3 examples:

  • Monitoring material doping concentration in the Epi process.
  • Controlling the uniformity of Silicon-Germanium deposition in Nanosheets.
  • Detecting critical contaminants in 3DNAND manufacturing.

These use cases have been validated by customers and some are already running in production.

Dopant Concentration

The first use case I will describe is monitoring the doping or concentration of Boron, while epitaxially growing Silicon-Germanium layers. Since very small variations in the Boron concentration can impact the final device performance, Metrion platform is used to qualify, monitor, and match Epi chambers in the Fab.

During the Epi process, Metrion is used to control some key parameters:

  • Monitoring Epi growth uniformity, by tracking the Ge concentration and the ratio of Germanium to Boron (referred to as “Ge fraction”).
  • Measuring the Dopant concentration profile, peak concentration, and uniformity across the wafer.

On the top graph you can see an example of a single measurement of Boron, Germanium, and Si concentration profiles.

On the bottom graph you can see the tracking over time of the average Boron concentration and Germanium fraction, as being sent to the fab host for automatic SPC of the Epi process.

As a result of chamber qualification and matching in the fab, customers can achieve tighter process control on the challenging Epi process and higher uptime to their Epi chambers.

Deposition Uniformity

The 2nd use case is controlling the uniformity of Silicon-Germanium deposition in Nanosheets.

One of the critical steps in the manufacturing of Nanosheets or Gate-All-Around, is the deposition of SiGe.

The concentration of the Germanium, and in particular its uniform deposition on each nanosheet, dramatically affects the selectivity of the following etch process and has direct impact on the electrical performance of the transistor.

In-Line SIMS is used to monitor within-layer and within-wafer uniformity:

  • On the bottom graph you can see the Germanium concentration variation across each one of the 3 individual Nanosheets in one specific location.
  • While on the top graph you can see the uniformity of the Germanium concentration across the entire wafer, based on 9 measurement points.

Contamination Detection

The last Metrion use case I will review is Contamination-Detection in the deposition of the Word-line in 3DNAND.

Fluorine and Chlorine, which are materials used in the deposition of the Tungsten metal layer, tend to diffuse into the dielectric layer and can kill the device.

With in-line SIMS customers can detect and measure the concentration of these deadly contaminants through the stack.

On the top graph you can see a Metrion measurement result of the concentration profile of Chlorine and Fluorine.

On the bottom graph you can see an SPC chart example of monitoring Fluorine within spec over time and the beginning of a process excursion where the Fluorine Level increases beyond the upper control limit.

Measuring these contaminants in-line is critical both for improved accuracy as well as for device yield. Sending wafers to the Lab takes too long to detect, putting many wafers at risk before the process excursion is detected.

Uniquely designed for HVM

One key point to note before I summarize:

Nova’s Metrion implementation is very different from a Lab SIMS.

The platform is a fully automated, recipe-driven, 300mm wafer metrology system that seamlessly integrates into a Fab workflow for wafer-level analysis.

From an architecture perspective, the Metrion is designed from the ground up for the production environment:

This unique architecture is reflected in many key components including contamination-free advanced source, and a novel detector technology, which can measure multiple materials simultaneously.

The innovative architecture and differentiated components result in superior depth resolution as well as stable and repeatable measurements.

The system performs the analysis on a small measurement area, compatible with production wafers.

Combined with state-of-the art data analysis, the Nova Metrion® provides quantitative and actionable results, enabling advanced process control of complex and critical multi-layer films.

Summary

To summarize this Webinar:

  • We are proud to launch the industry’s first In-Line SIMS, enabling SPC of material composition profiles within Semiconductor production lines.
  • The Nova Metrion® is a fully automated HVM-worthy platform, with unique architecture and data analytics, targeted for the process control of complex 3D logic and memory stacks.
  • The output is high quality, reliable and repeatable SIMS data.
  • The Nova Metrion® is already installed and running in multiple locations, and Nova is expected to recognize revenues from this platform during 2021.

Nova Metrion® is the latest addition to our growing portfolio of advanced materials metrology solutions, bringing better process control to our customers.

This concludes today’s Webinar.

Thank you for attending.

Click on the Link to Access the Legal Disclaimer – https://www.novami.com/wp-content/uploads/2021/10/Metrion-Webinar-FINAL-Disclaimer.pdf

There are Infinite ways to innovate and Nova is known to cultivate an atmosphere of innovation, encouraging our teams to take their brain power to the next level.

Nova’s innovation DNA over the years is manifested at many levels, driven by our people and demonstrating de-facto that there are infinite ways to innovate:

  • We have innovative solutions throughout Nova’s history and throughout all product-lifecycle development.
  • We innovate through collaboration both internally and externally.
  • We have demonstrated that innovation leads to more innovation.
  • We clearly see the impact of our innovation in the field, leading to differentiated technological solutions across all our product lines. These unique solutions are recognized by key customers and partners as reflected by their feedback received officially and non-officially in our day-to-day interaction.
  • Finally, we continue to invest in new directions to fuel Nova’s future growth

Nova has been an innovator since its inception – on the dimensional side from the invention of the concept of integrated metrology and on the material side in taking XPS to become an inline technology.

Over the years we continue to bring differentiated solutions encompassing all our technological aspects – algorithm, software, and hardware in both fields of material metrology and dimensional metrology. Beyond our leading technologies of XPS, Optical CD,  modeling, and machine learning we keep introducing brand new technologies into the fab such as Spectral Interferometry, Raman Spectroscopy, and more.

One quantitative aspect in which we can measure our innovation growth and uniqueness is via our IP protection. Over the years the number of patent applications we file keeps growing, currently resulting in over 800 applications cited by over 7500 other patent applications. In addition, the number of inventors keeps growing at a similar pace indicating that innovation is proliferating throughout the organization.

Anyone involved in innovation knows that a keyway to stem new directions and ideas is through collaboration. Over the years we have been collaborating with many of our customers and OEM partners. We have in-depth technological collaboration with leading companies in our industry, we partner with multiple industry consortia and, and we have joint activities with leading universities in Israel.

Most importantly we collaborate internally – As a truly global company, we experience worldwide collaboration across Nova’s territories, technologies, and business units. This collaboration is the direct result of teamwork and partnership among people – each and every one of Nova’s brilliant team members working with colleagues both near and far. These collaborations create an outstanding synergy, which fuels excellence and is a key ingredient in Nova’s culture and DNA.

One of the key characteristics of innovation is that it fuels itself – new ideas and new products lead us to uncharted territory thus bringing more innovation and additional ideas.

At this point, curiosity might arise as to the nature of the innovations presented annually in the Nova Innovation Award competition as well as in our day-to-day work. Yet that is something we cannot expose until these solutions are released to the market. Nevertheless, rest assured that they will be unveiled in due time, in Nova’s products, technologies, and services.

At Nova, 'Kaufman', became a synonym for innovation and groundbreaking ideas. So, you would hear people in conversation at Nova saying: "wow, that's a Kaufman!" Like saying: "great out-of-the-box thinking". When someone says: "This is a Kaufman Idea" they actually mean: "Great job!"

20 years ago, challenges were dealt with mostly by individuals. As market demands and challenge complexity grew over time, solutions increasingly required teamwork and a multi-disciplinary approach, in order to support a wider spectrum of avenues when seeking innovative solutions.

As the Nova Innovation Award submissions grew from just a few papers in the beginning to as many as 40 excellent papers in recent years, imagine the level of responsibility that the award committee has to shoulder to make sure they choose the best of the best.

The Nova Innovation Award evaluation process is a very exciting period for me, making me proud of the wide variety of innovation across multiple Nova units working together across the globe. This year’s theme of “infinite ways to innovate” has many aspects. We see innovation across all stages of our product development.

Most of the projects I participated in as part of the Nova Innovation Award (Kaufman) competition are the result of multidisciplinary teamwork with algorithms, marketing, and software. They’re challenging but have so much added value.

Collaboration and teamwork are some of Nova’s strongest assets. Working together to create what no one else can- that’s Applicable Physics at its best!

It is evident throughout the year that innovation leads to more innovations – new products and new technologies lead to differentiated algorithms and unique implementations.

We see this kind of innovation expressing itself in everything. So you would have Nova Innovation Award (Kaufman) works of altogether new technologies but also new uses of existing technologies and new algorithms allowing us to do things that we just could not do before and really out-of-the-box innovative application work.

It’s been interesting to see the cross-pollination of ideas between the dimensional and material sides of our business.  I believe that this cooperation has led to an increased pace of innovation at Nova.

The Nova Innovation Award (Kaufman) not only encourages innovative thinking but also enriches me with new ideas and thoughts surfaced by others. It has also become the glue that connects the field and Nova’s vision of innovation. It is our stage to dream and make an impact.

I’ve always felt it’s a fun and exciting time to be able to hear all of the new and innovative ideas presented. But as well, I think it helped me to be a more focused and innovative collaborative developer throughout the whole year as I look forward to next year’s Nova Innovation Award (Kaufman) award

From one event to the next – Nova employees not only showed great creativity in content but also showed great creativity in illustrating the content to the committee.

The fact that our experience and testimonies became the basis for a Kaufman paper was very empowering. We have much to contribute and the collaboration is a true boost to both us and to Nova.

There is an expression that describes it perfectly: If you want to go fast, go alone. If you want to go far, go together.

To me, the Kaufman (Nova Innovation Award) vibe is all about our passion and commitment to reinventing technology on a daily basis.

Every individual at Nova is a phenomenon – making teamwork nothing less than mind-blowing.

Nova Innovation Award’s (Kaufman) spirit overcomes corona, overcomes travel restrictions, and social distancing. And how do we know that? In the last 2 years, we had more international papers than ever before.

Altogether, all of these new ideas and inventions allow us to create the solutions in our portfolio. The solution that we eventually reach is the inter-linked skeleton of all of these ideas coming together and offering the amazing things a Nova tool can do.

The Nova Innovation Award (Kaufman) is an inspiring and authentic representation of Nova’s unique path where new development and the innovative spirit keep fueling our current and future growth.

A routine health check upended the life of Carmela Diamant, Nova's Corporate Payroll & Public Funding Reporting Manager. She was diagnosed with breast cancer. This is Carmela’s story of discovery, recovery, and personal growth.

Tell us a little about yourself.

I have three children, 28-year-old twin boys and a 23-year-old daughter. I’m happily married and live in Holon. I have been a payroll manager and accountant for thirty years now. I started my career in an accounting firm, and one of my clients was a small company called Nova. A few years in, Nova decided to open an internal accounting and payroll department and offered me the job. That’s how I began my career at Nova, twenty-two years ago. During these years, I’ve been promoted several times, and have studied and expanded my knowledge and expertise.

What made you stay at Nova for so many years? What is Nova’s secret?

The people. Period.

Twenty-two years is a long time; so much has happened and changed in my personal and professional life. There have been ups and downs, but one thing that has never changed here at Nova is the good people that I get to work with. I simply enjoy working with my colleagues and managers. A surprising fact about my long tenure is that during this period I have only had three different managers. This is not typical of the tech industry, but at Nova we have many people that love working here and stay for long periods.

About two years ago you were diagnosed with breast cancer. That couldn’t have been easy.

That is correct. A few years ago, one of my teammates discovered she had melanoma, but it was too late for her and she passed away at the age of 38. I remember how much Nova supported her and her family, even after her passing.
This hurt me very much and as a result, I started having regular checkups and mammograms and everything was fine. At the age of 50, I decided to partake in a general checkup program, a benefit Nova offers for employees over the age of 50.
The day after the checkup, I was told they found something suspicious in the mammogram and that I should go in for an ultrasound check, after which I was ordered to have a biopsy.

This was just before a holiday and I had to wait a few days until I could have the test.

I admit these were very difficult and nerve-wracking days.
I didn’t know what to expect and what it meant to have cancer, so I read a lot of information on the internet which only made things scarier.
A few days after the biopsy I was diagnosed with early-stage breast cancer. I was also told that luckily, the tumor I had was of a less aggressive type and that chances of recovery were in my favor.
The treatment included surgery and radiation treatments. The doctor who treated me was so compassionate, and she was almost always available to answer my questions and relieve my fears.
This helped me deal with the situation.

This early discovery saved me. By sending me for early testing, Nova literally saved my life.

How was your recovery period?

Most of the time I was on sick leave.  I returned to work gradually because I was very weak and tired most of the time. Nova’s wellbeing team and my friends and colleagues kept in touch all the time. I received baskets of gifts and goodies delivered to my home and Sharon, Nova’s CHRO kept calling me to make sure that all my needs were met.

What changes happened in your life during the healing process?

Despite my family’s support, I felt very lonely at that time. That led me to the discovery of the power of support groups for women going through the same thing. There were times when new friends, whom I had only just met, accompanied me to the treatments in the hospital and supported me. I discovered a new world of friendships, communities such as “GamAni Machlima” (lit. I am Also Recovering). It touched me deeply to discover how many good people had entered my world.

What did you discover about yourself during the recovery period?

Here’s something that surprised me: I became an athlete. I saw a post on Facebook inviting women who are recovering from breast cancer to join a running group. I don’t know why I went, but I did, and the rest is history.
I never liked running or jogging and it’s really something that isn’t easy for me, but I joined the group and now I run five to six kilometers and I’m happy and proud of it. I even became the captain of my town’s running group.
To my delight, more running groups have opened all over the country, thanks to one determined coach, other couches country-wide joined and chose to volunteer their time and many women who survived cancer joined this healthy community.

It has been proven in research, that exercise reduces the chances of cancer returning.

I also joined a rowing team, and I attend folk dancing with my husband twice a week.

It sounds as though this experience changed your life

Yes, this is correct, my recovery changed my life. Now that I’ve recovered, I’m the one who supports my new friends. A few days ago a friend of mine underwent another surgery. I organized a group of women, and together we sent her a fruit basket to sweeten her recovery.

What has changed in your worldview?

My outlook on life has changed. In the past, I was focused only on work and family and today I have learned to invest in myself and take some space for my interests and needs.
I encourage women to get tested by telling my story, and I am very happy when I hear of women that started getting regular checkups.
I also take a prominent role in connecting Nova to my running team, and their endeavors to raise awareness of the importance of the early discovery of breast cancer. Every year Nova employees join a run to raise awareness, and even Nova’s CEO runs as part of the project— that makes me very happy.

It especially moves me that Nova holds on-campus checkups for women during Breast Cancer Awareness Month. I too signed up for this test. It just shows how much Nova really cares about its employees.

Today I feel that I have great partners and friends, and I know now that I am not alone.

Her mother was a pediatrician who chose to prioritize time with her children over her career. Tamar Kam decided to take a more balanced approach in her career, family, and life choices.

With over twenty years at Nova, Tamar Kam is Nova’s Alpha & VAS Tech Manager. Here, Tamar shares her career experience and what she thinks about today’s work-life balance.

Tamar, did you ever dream you would become an electrical engineer?

When it was time to choose subjects I wanted to study in high school, I told my dad that I would probably marry at the age of eighteen and never have to work. My dad gave me a stern look and said, “not going to happen! You are going to study something that will allow you to work at a proper job and make a living.”

I ended up choosing to study electronics in high school, and I loved it, which is why I also pursued it in university. The difference between high school and the university was that in high school, we were eight girls out of forty students, and in university, we were eight women out of a class of 400.

Give us a glimpse into your life – your family and your hobbies. 

I’m married to Amit, and we have three kids; our oldest is seventeen, and our youngest is eleven. We live in Rehovot. I play volleyball, and I love camping with my family. Camping allows us to enjoy quiet time with our children. In fact, we have all our camping gear in our car, ready to go. We only take it out when we reach our destination.

Twenty-two years ago, you made a great decision to work at Nova. What made you choose Nova?

I interviewed with several companies, and at one of them, they asked me some questions that nobody dares to ask today. I also noticed that the employees waited for five o’clock to arrive to swipe their employee cards and go home. I realized I didn’t want to work in a place like that.

Sometime later, I interviewed at Nova, and I was hired to work in the electronics department. I told them that I’m a software person, not a hardware one, but I was informed that at Nova, everybody does everything. When I began working at Nova, I was the 187th employee.

Twenty-two years in one workplace is a lot, especially these days. What has made you stay?
I know twenty-two years sound like a lot, but there are people here working here even longer. It says a lot about the company and how we feel about it.

How many positions have you had at Nova?

Throughout my career at Nova, thus far, I’ve held four positions.
I started in the R&D electronics team. I was part of the team that defined and developed electronic cards and wiring diagrams. I then managed a team of electrical engineers as the team leader of Nova T500 Hardware.

After that position, I received an offer from Nova to relocate to the USA, a position in which I would provide support to one of our customers. By then, I had been at Nova for twelve years, and this sounded like an exciting opportunity. We were in the US for two and a half years.

After returning to Israel, I began working in the service department in a very intense, interesting, and challenging position. People in the service department escort a project through its entire lifecycle, starting from the initiation phase with R&D, and high-volume manufacturing with the operation team, transferring knowledge and supporting tools all the way to the project closure. In other words, we need to be intelligent, strong, and stress-proof.
But really, I get to work with people from every department and with customer representatives.

My current position title is Alpha & VAS Tech Manager.

We often hear about a family relocating because of an offer the husband receives. In your case, it was your career that led your family to relocate. Is there a difference if it is done to help the woman advance versus the man? 

That’s a great question, and it reminds me that when I was much younger, I received a phone call from a researcher who was analyzing the differences between men and women concerning their education, promotion, and salary. I remember being shocked at the notion that there’s a difference. I don’t think there’s any difference!

Regarding our relocation – every couple chooses the balance between life, career, family, etc., that is right for them. The most crucial factor is choosing the model that the couple wants to implement in their life.

In my case, my husband and I have chosen to balance our lives on every level. We are both electronic engineers, we supported each other through our academic studies, and we continue to support each other through our career development and personal life changes (e.g., having kids and raising them). We are both very career-oriented, and after our children were born and it was clear that I didn’t want to slow down my career, we got help in the form of a nanny for our kids. I had flexibility at work, but it was my choice that helped me take advantage of that flexibility.

When the offer came to relocate, I received my husband’s full support, just as he would have received mine, if he were in a similar position. In fact, when we decided to take the offer, it was clear that my husband would be home with the kids for the first year, until they would get well acclimated.

When you hear the term work-life balance, what does it mean to you?

I think the term work-life balance is usually applied more to professional women than to professional men. I think we need to consider talking about everyone’s overall balance of all aspects of their life: health, sports, hobbies, family, me-time, education, children, time for your partner, work, etc. It’s within this context that we need to understand how we balance our lives, and what elements we are willing to let go of because they are less of a priority.

What do you think your children would say about your role modeling –  being a mother and a professional?

I don’t think my children see me as a professional. They only know me as a mom. From their perspective, I’m not sure that they can relate to the complexity involved in being both a professional and a mother.

And yet, I’m sure something rubs off and a seed has been planted within them because they see the balance that my husband and I have, when in society that balance is not as obvious.

I’ll give you two recent examples. The first one relates to my daughter who decided she wanted to switch out of dancing classes to take up karate. When she announced that this is what she wanted to do, I was very happy with her choice. Still, her older brother asked her “are you sure you want to be a part of such a masculine sport and come home all bruised?

Also, my daughter will be turning twelve in a few months, and she has chosen to take upon herself the Jewish ritual of reading from the Torah, which is usually reserved for boys on their Bar Mizvah. In this case, our entire family is very supportive of her, and I have to admit, that I am very proud of her.

After sharing these two examples, I guess I really do serve as an example to my  children of what women can do and what they can achieve.

How do you see your own mother’s role modeling relative to yours?

Looking back at my own mother who was a pediatrician, she paid a price with her career, because she chose to work part-time in order to raise us and spend more time with us. She was a prominent figure in the creation of the health system in the town I grew up, but because she worked part-time, she never received the recognition she deserved. Up until recently, I didn’t understand the extent of the sacrifice she made, even though she was a pioneer in her field.

How does a young woman passionate about art from western India, become a nanoscale engineer in the Silicon Valley? Dr. Madhulika Korde’s story is one of self-motivation, a love of technology, and an inquisitive, innovative mind that sees the impossible as a starting point and thrives on challenge.

In our conversation, Madhulika shares her passion for industrial research and her tips to help students land their dream job – straight out of college.

Tell us a bit about yourself and your unique background.

My name is Madhulika Korde, and I am originally from India. My parents, sister, and grandmother are still in India, and it is always wonderful to go back and visit them. I was born in the beautiful town of Nashik, Maharashtra, which is western India. I came to the US in 2017, for grad school.

Traveling to a different country to learn that sounds like an adventure and a challenge. What is the most notable lesson you took from this experience?

It is not necessarily a lesson, but rather an experience.
When I was young, my mother sometimes used to wear fragrant flowers in her hair. As a kid, I used to jokingly say to her that it’s a style from the Bollywood movies from the ’80s. When I moved away from my country, I missed many aspects of my culture, family habits, and festivals. I realized how wonderful some of our traditions felt, even something as simple as wearing fragrant flowers in the hair and I appreciated the fact that my mother did what she liked and was not afraid of being judged by the newer generation. In my last visit to India, my mom and I were getting ready for a family photo shoot and we jokingly mentioned that wearing flowers in the hair isn’t so bad. And you can also see in the photo how lovely the experience was.

Dr. Madhulika Korde in a family visit

What inspires you?
I have always been drawn to the creative arts, works of great artists, and new, innovative technological advancements. I believe that these influence the way that I think and work.

What are you passionate about?

I am passionate about painting, especially nature-inspired scenes. I recently visited the Chihuly Museum and the Seattle Art Museum and I thoroughly enjoyed both of them.

What led you to pursue a career in Nanoscale Engineering?
Industrial research has always interested me. During my undergrad degree in my junior year, I worked on a summer project in which I increased the purity of a compound during manufacturing. I was able to successfully provide a solution which was implemented in large-scale manufacturing. This gave me the confidence to believe that I can do well working on industrial projects.
In addition, I was interested in learning more about material properties and the applications of materials research. This led me to take courses towards an online certificate while pursuing my undergrad degree.
Both these factors led me to major in Nanoscale Engineering, which provided me with the opportunity to work on industrial research as well as understand materials and their applications.  

What was your biggest challenge as a college student?
During my studies, I was happy and fortunate to be able to work on a project that gave me exposure to the industry. I was also blessed with a wonderful advisor who provided me with critical direction to help me advance the project.

However, my greatest challenge was to effectively complete all my assignments when there were both quantitative and qualitative deadlines. I am grateful to have had the challenges, as they helped me learn how to multi-task. They also helped me develop the ability to learn skills that were crucial for the project, faster.

We’re asking this on behalf of all the people in the world who do not understand: Can you please explain in simple words what exactly is Nanotechnology?

Haha. Without straying away from the common answer, I would say that Nanotechnology is the science of the very small – that which cannot be seen by the naked eye or touched with your hand. It’s the scale at which materials behave in an amazing way. That’s what makes the work fascinating.

Nanotechnology is something I’m involved in every day. I am constantly focused on the measurement of device structures – typically tens to hundreds of nanometers in dimension, without physically touching them.

How does your specific academic experience integrate with the needs of Nova’s Material Metrology Division?
I have an undergrad in Chemical Engineering and my grad major was in Nanoscale Engineering. My grad project was specifically focused on the non-destructive characterization of device structures using optical and X-Ray based techniques. Having worked on that project helped me understand the work at NOVA. In fact, a lot of the skills I learned in grad school are directly translated here. I look forward to learning even more at Nova.

What is the best part about working at Nova?
So far, my experience at Nova has been amazing. It is my first job and the team members as well as other employees made sure that I felt welcome and comfortable joining the project. I also received a personalized training plan to help me get up to speed with team goals, and start working with them in the most productive way. HR has been extremely supportive during my relocation and onboarding. Also, Nova’s company culture is very pro-employee and I feel lucky to have that.

I am excited that I will soon get to work on developing application-focused metrology solutions that will eventually be used by the semiconductor industry. Since I was driven to work on industrial research, it looks like I found the perfect job for me. I am extremely grateful to everyone who helped me get here. ????

What do your team members still not know about you?
That I make awesome chicken and fish curries ????

Dora Kholmiansy, an algorithm developer at Nova, took a deep breath before calling who she hoped would be her future manager, Kobi Barkan, Nova’s Algorithms Group Manager. She was already deep into the hiring process, which had taken place during the Covid-19 pandemic. All interviews had been done via Zoom, and nobody noticed she was pregnant.

Knowing that this could be an issue, Dora was worried about Kobi’s reaction but decided to speak to him about it. Kobi’s response was the best Dora could have wished for: He warmly congratulated her on her good news. When Dora asked if it would have any influence on the final decision to hire her, Kobi immediately reassured her: “Not at all! I want you to be part of Nova for many years to come, so I naturally assume that you will have children and raise them while working here.” Dora remembers the relief she felt at that moment, mixed with certainty, that she made the right choice with Nova.

I sat down with Dora to learn more about her and what she loves about her work.

I’m so excited for people to get to know you. Give us a little background about yourself.

I’m 34 years old, married to Yoav and the proud mother of three girls the youngest one is just 2 weeks old.  I live in Modi’in. I studied at the Hebrew University of Jerusalem. I hold a BSc in Physics and Chemistry and an MSc in Physics in Nonlinear Optics. Up until a few months ago, I was an intelligence officer in the IDF.

Dora Kholmiansi, Nova Ltd.

Tell us a bit about what you do at Nova.

I work in the algorithmic group, but I actually belong to the CTO group. This means twice as many meetings, but also twice as many treats served at those meetings. ????

Can you share your thoughts about what it’s like to be hired during an interview process affected by Covid-19?

Wow. It was a long and thorough process, which included six Zoom interviews. I have to admit it was peculiar but completely understandable given the circumstances. Everyone was so nice and pleasant to talk to that it made me really excited to join Nova.

What is your favorite part about working at Nova?

It has to be the exciting challenge of working on leading projects – ones at the forefront of the company’s business, even though I’ve only been here for several months. And besides, working with people here at Nova is so much fun. We have a rare atmosphere of friendship, collaboration, and camaraderie.

What makes you take pride in yourself?

Without hesitation, I can say that I’m very proud of my courage to make a significant change in my career – leaving behind a military career and starting anew as a physicist.

With three kids and one of them a newborn, a career, and life, you probably have a lot on your plate. Do you still have time for hobbies?

Up until I got pregnant, I practiced kung fu. I also paint oil paintings and love to travel. But as you mentioned, who has time for hobbies with three tiny tots?

What is your superpower?

If you ask me, it’s determination.

If you ask my mother, it’s being stubborn.

You seem to be very calm and relaxed. What drives you crazy and makes you mad?

Slow people. That drives me insane—for example, my husband. Every time we leave home, I end up waiting for him in the car for at least five minutes.

If you weren’t working for Nova as an algorithm developer, what would you be doing?

I’m now doing exactly what I dreamed of doing, so I would probably be doing the same.

What don’t your teammates know about you yet?

Hmmm. They still do not really know that I can be extremely sarcastic. On the other hand, I’m lighthearted and laugh a lot.

Name three reasons why someone would want to work at Nova:

  • The intellectual challenge – that is by far the top reason
  • The wonderful people, which I enjoy working with everyday
  • The variety of fruit that is served throughout the day

Want to Join Nova?
Click here to learn more about career opportunities at Nova

One of the biggest challenges for nanoscale fabrication is how to measure devices on such a minute scale. As the semiconductor industry demands ever smaller devices, the need for reliable, robust measurements for quality control and process optimization increases.

One robust and commonly used technique in semiconductor manufacturing is optical critical dimension (OCD) metrology. Standard, already widely adopted technologies include incidence spectral reflectometry and ellipsometry (SR/SE) technologies.1 However, a novel technology combining spectral measurements and interferometry offers additional advantages to these well-established approaches.

Optical Critical Dimension Metrology

Optical characterization of semiconductors is performed by measuring the sample’s reflectivity at different incidence angles, azimuths, polarizations, and wavelengths. Sometimes ellipsometry measurements are used to measure the relative phase between the reflected polarization components.1 This comprehensive suite of measurements makes it possible to determine dimensions and shapes for various structures. Such measurements are usually performed using a broadband white light source, shining it on the sample or wafer of interest, and measuring the reflected light and scattered light.

Detectors used are usually wavelength resolved and placed at normal and oblique angles relative to the incident light source. The reflectivity spectrum can be recovered using the information from the two angles and analyzed by comparing previous data of known samples or theoretical spectra. 

Schematic of current multichannel OCD tools
Figure 1. (Left Image) Schematic of current multichannel OCD tools, including normal incidence and oblique illumination and collection channels. (Right Image) Schematic of Spectral Interferometer (SI): light is split between the sample and a reference arm and then recombined and measured with a spectrometer.

The Missing Phase

Optical CD metrology is flexible, efficient, and fast, which leads to its wide adoption in semiconductor manufacturing.  In addition, while “high TPT” is indeed one of the main merits of OCD, accuracy isn’t. However, one aspect of information it lacks is data on the relative phases of the incident and reflected light that can provide another dimension of information on the sample.2 One of the challenges in the optical domain is that phase information cannot be recovered directly. This means that measurements must be made by using interference effects.3 Nova has developed the Nova Prism platform and the unique Spectral Interferometry technology precisely for this purpose.4

Interferometers work by taking a single beam and splitting it to form the interferometer’s two’ arms.’ One of these paths is kept as a reference, and the other interacts with the sample. The beams are then recombined or interfered, to produce a signal from which the phase information can be extracted. One of the arms’ path lengths can also be varied to scan the beams’ relative delay.3 Simply put – interferometry can transform a two-dimensional image into a three-dimensional one.

Nova Prism

The Nova Prism is an all-new platform incorporating Spectral Interferometry on top of traditional Optical CD capabilities. Nova Prism makes use of an interferometry scheme based on an advanced traditional scatterometry (NI SR and oblique SE) design4, to provide access to essential phase information, which is inaccessible by other current solutions.

One of the main challenges for spectral interferometry is performing such measurements over the wide wavelength ranges typically employed for reflectance measurements. The other is precisely recording the relative optical path for the two arms. The Nova Prism uses advanced hardware, including ultra-broadband optics and precision stages, to overcome both challenges.

As well as the instrumentation, the Nova Prism exploits a synergy of hardware and algorithms to provide uniquely sensitive measurements of a range of sample types.

Using industry-leading model-based and machine learning algorithms, Spectral Interferometry can solve applications such as tracking cavity geometries during etch formation with much greater sensitivity than traditional scatterometry techniques.

Unique Sensitivity

In this direct comparison of the new spectral interferometry set-up versus traditional scatterometry for characterization of cavity geometries, the accuracy of interferometry outperformed traditional methods for measuring the cavity dimensions and spacings by five times.5 The sample dimensions were measured using TEM, considered the gold standard for nanoscale sizing, and then compared to the optical results.

Cavity formation is a crucial step in the fabrication of advanced logic devices, and the cavity dimension directly impacts the functionality of the final transistor. The complexity of the object and the limited sensitivity of traditional OCD methods for such small-scale systems have left a critical metrology gap that spectral interferometry has been able to fill.3

High-End Metrology

Another application in which spectral interferometry shows it correlates to TEM for characterization is in the fabrication of gate-all-around stacked nanosheets.6

These are some of the most promising directions for future logic technology nodes and require a precisely sized inner spacer to properly isolate the channel from the source and drain regions. Even for the nanosheets’ challenging size, spectral interferometry could accurately measure the accurate dimensions and complete process flow. To find out how you could benefit from the high-end metrology measurements enabled by the Nova Prism, contact Nova today.

Alongside their instrumentation, Nova offers high-level training programs and specialist support to ensure you can maximize process improvements enabled by new technologies.

References 

  1. Ukraintsev, V. (2012). Review of reference metrology for nanotechnology: significance, challenges, and solutions. Journal of Micro/Nanolithography, MEMS, and MOEMS, 11(1), 011010. https://doi.org/10.1117/1.jmm.11.1.011010
  2. Rasheed M. A. Azzam (1997). Mueller-matrix ellipsometry: a review”. Proc. of SPIE Vol. 3121
  3. De Groot, P. J. (2019). A review of selected topics in interferometric optical metrology. Reports on Progress in Physics, 82(5). https://doi.org/10.1088/1361-6633/ab092d
  4. Nova (2021) Nova Prism, https://www.novami.com/nova-product/prism/, accessed 10th March 2021
  5. Vaid et al., (2008) Scatterometry as Technology Enabler for Embedded SiGe Process, Proc. of SPIE Vol. 6922
  6. Kong, D et al. (2020). Development of SiGe Indentation Process Control to Enable Stacked Nanosheet FET Technology. ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, https://doi.org/10.1109/ASMC49169.2020.9185226

At 31 years old, Leon Archimovich and his husband Assaf felt ready to become parents. They could not foresee that they would become parents to two children overnight: a two-week-old baby girl and her two-year-old brother.

In a life-changing decision, Leon, who works as a planner at Nova, and his husband, Assaf, a musician, decided to become a foster family to two siblings in urgent need of a warm, loving family. Intrigued? So were we. So, we sat down with Leon to talk about his career, life, family, and dreams.

Leon, what’s your story?

I was born in Ukraine and moved to Israel as a baby. My mother raised me, and I have the highest admiration for her and how she coped with life as an immigrant and single parent. My mother’s focus was always on doing the right thing, and education was always a top priority for her. So, walking the path she paved, I studied Industrial engineering and then got an MBA- a twofer to satisfy my academic curiosity and my mother’s sense of pride.

I’m happily married to Assaf and together we raise two foster children, who are the apple of our eyes.

I worked at various companies as a planner, but I already knew I wanted to work at Nova for several years. I was interviewed by Nova a few years back, but it didn’t work out then. But I didn’t give up, and a few years later, I noticed another job opening as a planner. I felt determined to join the company, so I applied again, and here I am. Sometimes it is just a matter of timing.

Why did you want to work for Nova?

I was drawn to the technology, to the dynamics, and the people who work here. It looked like a very innovative company from the outside, but now that I’ve been here for a year and a half, I also know Nova cares for us and that the employees’ wellbeing is a top priority. There’s also the gorgeous offices and the fact that the people are great to work and socialize with.

I love the dynamics, the ever-evolving and changing pace of things. The demands from my work change daily, things are very versatile, priorities change all the time, and I am required to be flexible, adjust quickly, and provide great service to my coworkers. A planner does a similar job at any organization, but here at Nova, I get that extra touch of challenge and collaboration, which I love.  

You became a family pretty much overnight. How did that happen?

Assaf and I always knew we wanted a large family. We were already in the process of joint-parenting with two lovely women when an unexpected family situation occurred, in which someone had to step in and step up to make sure two children had a stable, loving home.

In most cases, there are nine months of pregnancy, and you have time to get used to the idea of becoming a parent. In our case, we were an ordinary married couple who instantly became a family of four and had to learn to cope with the situation as it evolved. We are fortunate enough to be surrounded by loving and supportive friends and family, and they help us a lot.

Despite the challenges this surprise brought us, we feel so fortunate to have become parents to these two lovely children and realize every day that our journey is unique and magical. It is almost unbelievable that during a worldwide pandemic, we became parents to Lenny and Peter. It was simply meant to be!

Let’s go back in time a bit: how did you meet your husband?

Assaf is my first serious relationship, and we met online. At first, we both weren’t sure where this would lead, but rather quickly, we realized we are in love and moved in together.
Being raised in a conservative family, I didn’t tell my mom and stepdad about this until Assaf had proposed.

Hold it right there! You have to tell us about the proposal

We have already been together for a while when our friends announced they were planning to get married in Paris. I told my friends that while we will be in Paris, I intend to propose to Assaf. I thought that either Disneyland or the Eifel Tower would be the perfect setting for my proposal. Little did I know that Assaf was going to beat me to it, as he proposed to me during a romantic trip to the old city of Jerusalem four months before our trip to Paris.

We got married in Vegas and then had a large party with friends and family in Israel.

Is it ok to challenge you a bit? Your story sounds like a walk in the park, while many LGBTQ experience challenges and hardships.  

Indeed, in many cases, life as an LGBTQ can be very challenging. But fortunately for Assaf and me – our path was smoother, albeit not always easy. My husband’s family fully accepted him as he was. In my case, it took my parents a little longer to get used to the idea.

I grew up in a conservative house where everything needs to be by the book: finish high school, go to college, be an excellent student (mostly in math), get married, have kids. Do this and that so your mom will be happy. The message that came across is that being different is wrong. As a child in school, there were all kinds of insults from kids around me. So I did the “normative” thing because I didn’t want to be different.

After I graduated high school, I became increasingly aware of my attraction to men- and I chose to live happily, proudly, and openly. However, since my parents are not so open, it was difficult to tell them, and I worried about their reaction. After Assaf proposed, I realized it was time to deal with this. I told my aunt and uncle that I am gay, and they supported me wholeheartedly. Then they joined me when I shared this with my mom. There was a bit of drama there, but at the end of the day, she said she would love me and support me no matter what.

Today, in a way, I know I lived up to all my parents’ expectations:  I have an academic education, I have a career in a great hi-tech company, I’m happily married with two kids and a dog. What more could my mom want?

I feel that I lead a very normal life and society accepts me, my family, and my life choices. 

What do your colleagues not know about you?

I used to be a modern dancer, and I was part of a performing dance company, and we even traveled abroad together. Dancing fills my soul. I know it is a typecast, being a gay dancer, but I assure you that not every dancer is gay, and not every gay is a dancer ????

What is your parenting motto?

I teach my children it is ok to be different as much as it is ok to belong. I want them never to fear saying what they think and authentically following their hearts, beliefs, and passions. I wasn’t raised like this, and therefore, it is vital for me to raise them in a pluralistic and diverse environment, where they know they have the choice to be who they want to be.

Assaf and I are complete opposites in so many ways. I love sports, he loves the couch, I am a morning person, he is a night owl, I work in the hi-tech industry while he is a musician. And we have a different parenting style.

While we were both most ready to become parents I am the more responsible parent, the caretaker, in charge of setting limits, responsible for all the bureaucratic aspects and Assaf is the one that spoils the kids, hugs them and allows a bit of release from the limits.

So the kids get the best of both worlds; love, warmth, hugs, proper upbringing, education, everything they need on the material level and also a healthy routine, which, unfortunately, they didn’t have in their previous home.

The kids are always in my mind and heart and I find myself occupied throughout the day thinking about their everyday needs. Being a parent is a tedious mission and sometimes it is even hard. But then we get a hug from Peter or a smile from Lenny and our hearts melt. Suddenly all the hardship simply disappears. 

A message to the world…

Live freely, authentically and make sure to make a significant contribution to society and to the world.

 

Nova's newfound interest in the fascinating sea creature, Mantis Shrimps, stems from its incredible eyes and their ability to see better than any other living creature. Much like Nova's advanced metrology devices.

The Australian people call it “Prawn Killer”, and deep-sea divers call it: “Finger Smashers” due to the speed at which they can spear, cut and shock their prey with their powerful claws.

Mantis shrimps are extraordinary sea creatures. they can throw the fastest punches in the ocean The crustacean reaching up to 40cm in size can rapidly unfold their claws at their prey, with an acceleration of 10,000g and speeds of 80km/h. These strikes are so rapid, they vaporize the water around them and create a shockwave that can stun or kill their prey, even if the initial strike missed its target. So, if you find these little creatures adorable and wish to have one as a pet, take extra caution when handling them and make sure to use a bullet-proof aquarium glass.

Yet, what’s more, remarkable about the mantis shrimp is another feature– its eyes; Mantis shrimps are thought to have the most complex eyes in nature. They have compound eyes made up of tens of thousands of ommatidia – tiny independent photoreception units – each with its own lens, cornea, photoreceptor cells and pigment cells (much like flies). Each eye is mounted on a mobile stalk and can move independently. Each eye is further divided into three regions looking at the same point in space. This gives the mantis shrimp the ability to perceive depth with just one eye.

While we humans have three types of photoreceptor in our eyes, through which we experience the rich colours of the world around us, the eyes of mantis shrimps have up to 16 types of photoreceptor cells. Twelve of these photoreceptors are used for colour analysis, for light wavelengths ranging from the deep ultraviolet to the far red (300-720nm). The other four are used to analyze polarized light. In addition to detecting linear polarized light, some mantis shrimp species have been reported to be able to detect circularly polarized light. Such ability has not identified in any other living creature.

Now you might be puzzled, asking yourself, is it Nova blog that or the National Geographic?

Why are we, at Nova, are so fascinated with this creature?

When it comes to understanding why the mantis shrimp requires such complex eyes and its uses, we are nowhere close to solving the mystery. Polarization vision can be used for mating and secret communication while avoiding predators’ attention. Their elaborate eyes may also enable them to recognize predators’ prey easily and with accurate depth perception. This is especially critical for their hunting manner, which requires accurate ranging information, with split-second response times.

Ever curious about anything that has to do with better vision and data analyses, we had to check how this relates to Nova and the semiconductor metrology industry. At Nova, we use optical metrology to measure the dimensions and materials of our semiconductor samples with exceptional precision. We always seek to extend our spectral range, use the light polarization properties, and increase the amount of information gathered. But having a lot of data doesn’t necessarily mean getting better results. Having “only” three photoreceptors and lacking many of the features that the mantis shrimp eye possesses, it is the human brain that uses heavy processing of the impulses from the eyes to create vivid, colourful, and sharp images. Such processing requires powerful brains as well as time. When attempting to recognize prey or predator and deploy its extraordinary claw punch, the mantis shrimp cannot allow itself to waste precious time.

Likewise, when attempting to provide a fast and accurate interpretation of the collected data, Nova’s tools have to provide the collected data and its analyses rapidly. Mantis shrimp utilizes its many types of photoreceptors as a neural-wired system. The visual information is preprocessed by the eyes, allowing its brain to understand its surroundings without dealing with the complex process task used by other species, which requires more time and energy. Much like this, Nova tools utilize neural networking to overcome the time-consuming process of data analysis and provide an unmatched dimensional accuracy of the nano-metric structures under inspection.

At Nova, we never get enough of learning what nature can do and how we can simulate it to provide the best metrology possible.